Sub-stoichiometric SiNx Deposited by PECVD for Optical Coatings for Gravitational Wave Detection

Mar 15, 2026

by K. Saunders
Reference:
K. Saunders, “Sub-stoichiometric SiNx Deposited by PECVD for Optical Coatings for Gravitational Wave Detection”, CMAM (UAM).
Bibtex Entry:
@misc{saunders_sub-stoichiometric_2026,
	address = {CMAM (UAM)},
	title = {Sub-stoichiometric {SiNx} {Deposited} by {PECVD} for {Optical} {Coatings} for {Gravitational} {Wave} {Detection}},
	author = {Saunders, K.},
	month = jan,
	year = {2026},
}