Three-Dimensional Silicon Micro and Nano-machinig

Jan 11, 2025

by Azimi Sara

Reference:

Azimi Sara, “Three-Dimensional Silicon Micro and Nano-machinig”, Seminars at CMAM, National University of Singapo.

Bibtex Entry:

@misc{sara_azimi_three-dimensional_2013,
	address = {National University of Singapo},
	type = {Seminars at {CMAM}},
	title = {Three-{Dimensional} {Silicon} {Micro} and {Nano}-machinig},
	author = {Sara, Azimi},
	month = mar,
	year = {2013},
}