Optical and transport properties of Ti-doped In2O3 thin films prepared by electron beam physical vapour deposition

@article{sanchez-marcos_optical_2010,
	title = {Optical and transport properties of {Ti}-doped {In2O3} thin films prepared by electron beam physical vapour deposition},
	volume = {207},
	issn = {1862-6319},
	url = {http://onlinelibrary.wiley.com/doi/10.1002/pssa.200983717/abstract},
	doi = {10.1002/pssa.200983717},
	abstract = {Ti-doped In2O3 (ITiO) thin films have been prepared by electron beam physical vapour deposition (EB-PVD). Their optical and electrical properties are studied for the obtained compositions. After oxygen annealing all samples show excellent optical transparence; additionally, maximum values for conductivity are obtained for samples with titanium contents near 6 at.%, with typical resistivity values of 4 × 10−5 Ω cm. Finally, the band-gap energy evolution is studied for the set of samples.},
	language = {en},
	number = {7},
	urldate = {2017-08-01},
	journal = {physica status solidi (a)},
	author = {Sánchez-Marcos, J. and Ochando, I. M. and Galindo, R. Escobar and Martínez-Morillas, R. and Prieto, C.},
	month = jul,
	year = {2010},
	keywords = {doping, electrical properties, ITO, optical properties, PVD},
	pages = {1549--1553},
	file = {Full Text PDF:E:\cmam_papers\files\722\Sánchez-Marcos et al. - 2010 - Optical and transport properties of Ti-doped In2O3.pdf:application/pdf;Full Text PDF:E:\Usuarios\Administrator\Zotero\storage\LA5Q967T\Sánchez-Marcos et al. - 2010 - Optical and transport properties of Ti-doped In2O3.pdf:application/pdf;Snapshot:E:\cmam_papers\files\721\abstract.html:text/html;Snapshot:E:\Usuarios\Administrator\Zotero\storage\TCRG4U59\abstract.html:text/html},
}