Nanopatterning of silicon surfaces by ion beam sputtering

Apr 1, 2022

by J.A. and Vázquez L. Sánchez-García, R. and Plantevin O. Gago, T.H. and Albella J.M. Metzger and J. and Castro M. Muñoz-García
Reference:
J.A. and Vázquez L. Sánchez-García, R. and Plantevin O. Gago, T.H. and Albella J.M. Metzger and J. and Castro M. Muñoz-García, “Nanopatterning of silicon surfaces by ion beam sputtering”, Strasbourg, France, 2007.
Bibtex Entry:
@misc{sanchez-garcia_ja_nanopatterning_2007,
	address = {Strasbourg, France},
	type = {Poster contribution},
	title = {Nanopatterning of silicon surfaces by ion beam sputtering},
	author = {{Sánchez-García, J.A.} and {Vázquez, L.} and {Gago, R.} and {Plantevin, O.} and {Metzger, T.H.} and {Albella, J.M.} and {Muñoz-García, J.} and {Castro, M.} and {Cuerno, R.}},
	month = jun,
	year = {2007},
}