by E. Salas, R. J. Jiménez Riobóo, J. Sánchez-Marcos, F. Jiménez-Villacorta, A. Muñoz-Martín, J. E. Prieto, V. Joco and C. Prieto
Abstract:
Boron-carbon-nitrogen films were grown by RF reactive sputtering from a B4C target and N2 as reactive gas. The films present phase segregation and are mechanically softer than boron carbide films (a factor of more than 2 in Young’s modulus). This fact can turn out as an advantage in order to select buffer layers to better anchor boron carbide films on substrates eliminating thermally induced mechanical tensions.
Reference:
E. Salas, R. J. Jiménez Riobóo, J. Sánchez-Marcos, F. Jiménez-Villacorta, A. Muñoz-Martín, J. E. Prieto, V. Joco and C. Prieto, “Elastic properties of B-C-N films grown by N2-reactive sputtering from boron carbide targets”, Journal of Applied Physics, vol. 114, no. 21, pp. 213508.
Bibtex Entry:
@article{salas_elastic_2013,
title = {Elastic properties of {B}-{C}-{N} films grown by {N2}-reactive sputtering from boron carbide targets},
volume = {114},
issn = {0021-8979},
url = {http://aip.scitation.org/doi/10.1063/1.4837655},
doi = {10.1063/1.4837655},
abstract = {Boron-carbon-nitrogen films were grown by RF reactive sputtering from a B4C target and N2 as reactive gas. The films present phase segregation and are mechanically softer than boron carbide films (a factor of more than 2 in Young's modulus). This fact can turn out as an advantage in order to select buffer layers to better anchor boron carbide films on substrates eliminating thermally induced mechanical tensions.},
number = {21},
urldate = {2017-08-01},
journal = {Journal of Applied Physics},
author = {Salas, E. and Jiménez Riobóo, R. J. and Sánchez-Marcos, J. and Jiménez-Villacorta, F. and Muñoz-Martín, A. and Prieto, J. E. and Joco, V. and Prieto, C.},
month = dec,
year = {2013},
pages = {213508},
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}