Effect of rapid thermal annealing on the composition of Au/Ti/Al/Ti ohmic contacts for GaN-based microdevices

@article{redondo-cubero_effect_2013,
	series = {13th {International} {Conference} on {Microprobe} {Technology} and {Applications} ({ICNMTA2012})},
	title = {Effect of rapid thermal annealing on the composition of {Au}/{Ti}/{Al}/{Ti} ohmic contacts for {GaN}-based microdevices},
	volume = {306},
	issn = {0168-583X},
	url = {http://www.sciencedirect.com/science/article/pii/S0168583X12007914},
	doi = {10.1016/j.nimb.2012.12.030},
	abstract = {The homogeneity of Au/Ti/Al/Ti ohmic contacts for AlGaN/GaN devices was analyzed as a function of the thickness of the Ti barrier (30nm{textless}d{textless}90nm). After rapid thermal annealing, the Al out-diffusion is induced even for the thickest Ti barrier, accompanied by Au in-diffusion and the oxidation of the surface. Uniform contacts were found only for d{textgreater}50nm, although several compositional deficiencies were identified in the distribution maps obtained with the ion microprobe, including the formation of craters. A clear interplay between Ti and Au was found, suggesting the relevance of lateral flows during the rapid thermal annealing.},
	urldate = {2017-08-01},
	journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms},
	author = {Redondo-Cubero, A. and Ynsa, M. D. and Romero, M. F. and Alves, L. C. and Muñoz, E.},
	month = jul,
	year = {2013},
	keywords = {RBS, PIXE, GaN, Ohmic contacts, Transistors},
	pages = {212--217},
	file = {ScienceDirect Full Text PDF:E:\cmam_papers\files\798\Redondo-Cubero et al. - 2013 - Effect of rapid thermal annealing on the compositi.pdf:application/pdf;ScienceDirect Full Text PDF:E:\Usuarios\Administrator\Zotero\storage\BPKW5374\Redondo-Cubero et al. - 2013 - Effect of rapid thermal annealing on the compositi.pdf:application/pdf;ScienceDirect Snapshot:E:\cmam_papers\files\797\S0168583X12007914.html:text/html;ScienceDirect Snapshot:E:\Usuarios\Administrator\Zotero\storage\94BD7WW4\S0168583X12007914.html:text/html},
}