Structural investigations of ZnO thin films grown by reactive pulsed magnetron sputtering at different substrate temperatures, Charged and neutral particles channeling phenomena

Apr 1, 2022

by A. and Vinnichenko M. Redondo-Cubero and M. and Gago R. Krause
Reference:
A. and Vinnichenko M. Redondo-Cubero and M. and Gago R. Krause, “Structural investigations of ZnO thin films grown by reactive pulsed magnetron sputtering at different substrate temperatures, Charged and neutral particles channeling phenomena”, Erice , Italy, 2008.
Bibtex Entry:
@misc{redondo-cubero_a_structural_2008,
	address = {Erice , Italy},
	type = {Poster contribution},
	title = {Structural investigations of {ZnO} thin films grown by reactive pulsed magnetron sputtering at different substrate temperatures, {Charged} and neutral particles channeling phenomena},
	author = {{Redondo-Cubero, A.} and {Vinnichenko, M.} and {Krause, M.} and {Gago, R.}},
	year = {2008},
}