Towards nanometric resolution in multilayer depth profiling: RBS, SIMS, XPS and GDOES comparative study

by Escobar Galindo Ramón

Reference:

Escobar Galindo Ramón, “Towards nanometric resolution in multilayer depth profiling: RBS, SIMS, XPS and GDOES comparative study”, Seminars at CMAM, CMAM, Madrid.

Bibtex Entry:

@misc{ramon_escobar_galindo_towards_2009,
	address = {CMAM, Madrid},
	type = {Seminars at {CMAM}},
	title = {Towards nanometric resolution in multilayer depth profiling: {RBS}, {SIMS}, {XPS} and {GDOES} comparative study},
	author = {Ramón, Escobar Galindo},
	month = dec,
	year = {2009},
}