Tuning the morphology of silicon surface nanopatterns induced by low-energy ion beam sputtering with simultaneous metal incorporation

by Gago R., Sánchez-Gracía J.A., Redondo-Cubero A. and Vázquez L.

Reference:

Gago R., Sánchez-Gracía J.A., Redondo-Cubero A. and Vázquez L., “Tuning the morphology of silicon surface nanopatterns induced by low-energy ion beam sputtering with simultaneous metal incorporation”, Invited contributions, Nanoscale Modification of Surfaces and Thin Films Workshop 2009, Rathen, Germany.

Bibtex Entry:

@misc{r_tuning_2009,
	address = {Nanoscale Modification of Surfaces and Thin Films Workshop 2009, Rathen, Germany},
	type = {Invited contributions},
	title = {Tuning the morphology of silicon surface nanopatterns induced by low-energy ion beam sputtering with simultaneous metal incorporation},
	author = {R., , Gago and J.A., , Sánchez-Gracía and A., , Redondo-Cubero and L., , Vázquez},
	month = aug,
	year = {2009},
}