Towards nanometric resolution in multilayer depth profiling: RBS, SIMS, XPS and GDOES comparative study

Nov 22, 2023

by Escobar Galindo R.
Reference:
Escobar Galindo R., “Towards nanometric resolution in multilayer depth profiling: RBS, SIMS, XPS and GDOES comparative study”, Invited contributions, III Workshop sobre Nanociencia y Nanotecnología Analíticas., Oviedo, Spain.
Bibtex Entry:
@misc{r_towards_2009,
	address = {III Workshop sobre Nanociencia y Nanotecnología Analíticas., Oviedo, Spain},
	type = {Invited contributions},
	title = {Towards nanometric resolution in multilayer depth profiling: {RBS}, {SIMS}, {XPS} and {GDOES} comparative study},
	author = {R., , Escobar Galindo},
	year = {2009},
}