by E. Punzón Quijorna, V. Torres Costa, F. Agulló-Rueda, P. Herrero Fernández, A. Climent, F. Rossi and M. Manso Silván
Reference:
E. Punzón Quijorna, V. Torres Costa, F. Agulló-Rueda, P. Herrero Fernández, A. Climent, F. Rossi and M. Manso Silván, “TiNxOy/TiN dielectric contrasts obtained by ion implantation of; structural, optical and electrical properties”, Journal of Physics D: Applied Physics, vol. 44, no. 23, pp. 235501.
Bibtex Entry:
@article{quijorna_tinxoy/tin_2011,
title = {{TiNxOy}/{TiN} dielectric contrasts obtained by ion implantation of; structural, optical and electrical properties},
volume = {44},
number = {23},
journal = {Journal of Physics D: Applied Physics},
author = {Quijorna, E. Punzón and Costa, V. Torres and Agulló-Rueda, F. and Fernández, P. Herrero and Climent, A. and Rossi, F. and Silván, M. Manso},
year = {2011},
pages = {235501},
file = {Fulltext:E:\cmam_papers\files\1429\Quijorna et al. - 2011 - TiNxOyTiN dielectric contrasts obtained by ion im.pdf:application/pdf;Fulltext:E:\Usuarios\Administrator\Zotero\storage\HQKJR3QB\Quijorna et al. - 2011 - TiNxOyTiN dielectric contrasts obtained by ion im.pdf:application/pdf;Snapshot:E:\cmam_papers\files\1428\meta.html:text/html;Snapshot:E:\Usuarios\Administrator\Zotero\storage\H2R4AMY2\meta.html:text/html},
}