by María Morán-Pedroso, Raúl Gago, Jaakko Julin, Eduardo Salas-Colera, Ignacio Jimenez, Alicia de Andrés and Carlos Prieto
Abstract:
The optical and electrical properties of fluorinated tin oxide (FTO) films deposited at room temperature by sputtering have been investigated varying the fluorine content and the hydrogen atmosphere. The complex behavior of the obtained films is disclosed using a wide set of characterization techniques that reveals the combined effects of these two parameters on the generated defects. These defects control the electrical transport (carrier density, mobility and conductivity), the optical properties (band gap and defects-related absorption and photoluminescence) and finally promote the amorphization of the samples. H2 in the sputtering gas does not modify the H content in the films but induces the partial reduction of tin (from Sn4+ to Sn2+) and the consequent generation of oxygen vacancies with shallow energy levels close to the valence band. A variation of up to four orders of magnitude in electrical conductivity is reported in samples with the appropriate fluorine doping and hydrogen fraction in the sputtering gas, maintaining excellent optical transparency. Optimized room temperature grown electrodes reach sheet resistance textasciitilde20 Ω/□ and transparency textgreater90%. This room temperature deposition process enables film preparation on flexible organic substrates, such as polyethylene terephthalate (PET), with identical performance of doubtless interest in flexible and large scale electronics.
Reference:
María Morán-Pedroso, Raúl Gago, Jaakko Julin, Eduardo Salas-Colera, Ignacio Jimenez, Alicia de Andrés and Carlos Prieto, “Correlated effects of fluorine and hydrogen in fluorinated tin oxide (FTO) transparent electrodes deposited by sputtering at room temperature”, Applied Surface Science, vol. 537, pp. 147906.
Bibtex Entry:
@article{moran-pedroso_correlated_2021,
	title = {Correlated effects of fluorine and hydrogen in fluorinated tin oxide ({FTO}) transparent electrodes deposited by sputtering at room temperature},
	volume = {537},
	issn = {0169-4332},
	url = {https://www.sciencedirect.com/science/article/pii/S0169433220326635},
	doi = {10.1016/j.apsusc.2020.147906},
	abstract = {The optical and electrical properties of fluorinated tin oxide (FTO) films deposited at room temperature by sputtering have been investigated varying the fluorine content and the hydrogen atmosphere. The complex behavior of the obtained films is disclosed using a wide set of characterization techniques that reveals the combined effects of these two parameters on the generated defects. These defects control the electrical transport (carrier density, mobility and conductivity), the optical properties (band gap and defects-related absorption and photoluminescence) and finally promote the amorphization of the samples. H2 in the sputtering gas does not modify the H content in the films but induces the partial reduction of tin (from Sn4+ to Sn2+) and the consequent generation of oxygen vacancies with shallow energy levels close to the valence band. A variation of up to four orders of magnitude in electrical conductivity is reported in samples with the appropriate fluorine doping and hydrogen fraction in the sputtering gas, maintaining excellent optical transparency. Optimized room temperature grown electrodes reach sheet resistance {textasciitilde}20 Ω/□ and transparency {textgreater}90%. This room temperature deposition process enables film preparation on flexible organic substrates, such as polyethylene terephthalate (PET), with identical performance of doubtless interest in flexible and large scale electronics.},
	language = {en},
	urldate = {2021-04-09},
	journal = {Applied Surface Science},
	author = {Morán-Pedroso, María and Gago, Raúl and Julin, Jaakko and Salas-Colera, Eduardo and Jimenez, Ignacio and de Andrés, Alicia and Prieto, Carlos},
	month = jan,
	year = {2021},
	keywords = {Fluorinated tin oxide, Room temperature film preparation, Transparent conductive materials},
	pages = {147906},
	file = {ScienceDirect Full Text PDF:E:\Usuarios\Administrator\Zotero\storage\LKFE694K\Morán-Pedroso et al. - 2021 - Correlated effects of fluorine and hydrogen in flu.pdf:application/pdf;ScienceDirect Snapshot:E:\Usuarios\Administrator\Zotero\storage\VGG9LGAX\S0169433220326635.html:text/html},
}