Nano- and micro-structuring by heavy ion beam-based lithography

Jan 11, 2025

by Jensen Jens

Reference:

Jensen Jens, “Nano- and micro-structuring by heavy ion beam-based lithography”, Seminars at CMAM, Department of Engineering Sciences, Upsala University, Sweden.

Bibtex Entry:

@misc{jens_jensen_nano-_2008,
	address = {Department of Engineering Sciences, Upsala University, Sweden},
	type = {Seminars at {CMAM}},
	title = {Nano- and micro-structuring by heavy ion beam-based lithography},
	author = {Jens, Jensen},
	month = dec,
	year = {2008},
}