Nanopatterning of silicon surfaces by ion beam sputtering | Centro de Micro-Análisis de Materiales

by Sánchez-García J.A., Vázquez L., Gago R., Plantevin O., Metzger T.H., J.M. Albella, J. Muñoz-García, M. Castro and Cuerno R. Cuerno

Reference:

Sánchez-García J.A., Vázquez L., Gago R., Plantevin O., Metzger T.H., J.M. Albella, J. Muñoz-García, M. Castro and Cuerno R. Cuerno, “Nanopatterning of silicon surfaces by ion beam sputtering”, Poster contribution, E-MRS 2007 Spring Meeting, Strasbourg, France.

Bibtex Entry:

@misc{ja_nanopatterning_2007,
	address = {E-MRS 2007 Spring Meeting, Strasbourg, France},
	type = {Poster contribution},
	title = {Nanopatterning of silicon surfaces by ion beam sputtering},
	author = {J.A., , Sánchez-García and L., , Vázquez and R., , Gago and O., , Plantevin and T.H., , Metzger and J.M. Albella, and J. Muñoz-García, and M. Castro, and R. Cuerno,, , Cuerno},
	month = jun,
	year = {2007},
}