by G. W. Grime, C. J. Sofield, I. Gomez-Morilla, R. Gwilliam, M. D. Ynsa and O. Enguita
Abstract:
We have investigated the mechanism of high rate erosion which is observed when polytetrafluoroethylene (PTFE) is exposed to MeV protons in an oxygen rich atmosphere (e.g. air). Using currents of the order of nA, it is possible to create holes with depths of millimetres and diameter defined by the beam area on the surface with exposure times of minutes. This is not observed in atmospheres of nitrogen, helium or argon nor in vacuum. We propose that the erosion is a result of the formation of a stable gaseous compound following beam induced decomposition of the PTFE (possibly an acyl fluoride) which does not re-deposit in the hole. We present the results of experiments leading to this hypothesis and propose a method for fabricating three-dimensional structures in PTFE with micrometre feature size. This process is the subject of an international patent application.
Reference:
G. W. Grime, C. J. Sofield, I. Gomez-Morilla, R. Gwilliam, M. D. Ynsa and O. Enguita, “Rapid direct micromachining of PTFE using MeV ions in an oxygen rich atmosphere”, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 231, no. 1, pp. 378–383.
Bibtex Entry:
@article{grime_rapid_2005,
series = {Nuclear {Microprobe} {Technology} and {Applications}},
title = {Rapid direct micromachining of {PTFE} using {MeV} ions in an oxygen rich atmosphere},
volume = {231},
issn = {0168-583X},
url = {http://www.sciencedirect.com/science/article/pii/S0168583X05001060},
doi = {10.1016/j.nimb.2005.01.086},
abstract = {We have investigated the mechanism of high rate erosion which is observed when polytetrafluoroethylene (PTFE) is exposed to MeV protons in an oxygen rich atmosphere (e.g. air). Using currents of the order of nA, it is possible to create holes with depths of millimetres and diameter defined by the beam area on the surface with exposure times of minutes. This is not observed in atmospheres of nitrogen, helium or argon nor in vacuum. We propose that the erosion is a result of the formation of a stable gaseous compound following beam induced decomposition of the PTFE (possibly an acyl fluoride) which does not re-deposit in the hole. We present the results of experiments leading to this hypothesis and propose a method for fabricating three-dimensional structures in PTFE with micrometre feature size. This process is the subject of an international patent application.},
number = {1},
urldate = {2017-11-20},
journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms},
author = {Grime, G. W. and Sofield, C. J. and Gomez-Morilla, I. and Gwilliam, R. and Ynsa, M. D. and Enguita, O.},
month = apr,
year = {2005},
keywords = {Radiation damage, Fluoropolymers, Ion beam lithography, Micromachining},
pages = {378--383},
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}