Tuning the morphology of silicon surface nanopatterns induced by low-energy ion beam sputtering with simultaneous metal incorporation

by R. and Sánchez-Gracía J.A. Gago and A. and Vázquez L. Redondo-Cubero

Reference:

R. and Sánchez-Gracía J.A. Gago and A. and Vázquez L. Redondo-Cubero, “Tuning the morphology of silicon surface nanopatterns induced by low-energy ion beam sputtering with simultaneous metal incorporation”, Rathen, Germany, 2009.

Bibtex Entry:

@misc{gago_r_tuning_2009,
	address = {Rathen, Germany},
	type = {Invited contributions},
	title = {Tuning the morphology of silicon surface nanopatterns induced by low-energy ion beam sputtering with simultaneous metal incorporation},
	author = {{Gago, R.} and {Sánchez-Gracía, J.A.} and {Redondo-Cubero, A.} and {Vázquez, L.}},
	month = aug,
	year = {2009},
}