Comparison of depth profiling in Cr-Ti-Al multilayer stacks by scattering and optical-emission ion-based techniques

Apr 1, 2022

by R. Gago, R. Escobar Galindo, E. Forniés, L. and Albella J.M. Vázquez and A. and Climent Font A. Muñoz-Martin
Reference:
R. Gago, R. Escobar Galindo, E. Forniés, L. and Albella J.M. Vázquez and A. and Climent Font A. Muñoz-Martin, “Comparison of depth profiling in Cr-Ti-Al multilayer stacks by scattering and optical-emission ion-based techniques”, Seville, Spain, 2005.
Bibtex Entry:
@misc{gago_r_comparison_2005,
	address = {Seville, Spain},
	type = {Poster contribution},
	title = {Comparison of depth profiling in {Cr}-{Ti}-{Al} multilayer stacks by scattering and optical-emission ion-based techniques},
	author = {{Gago, R.} and Escobar Galindo, R. and Forniés, E. and {Vázquez, L.} and {Albella, J.M.} and {Muñoz-Martin, A.} and {Climent Font, A.}},
	month = jul,
	year = {2005},
}