by R. Gago, A. Redondo-Cubero, J. L. Endrino, I. Jiménez and N. Shevchenko
Abstract:
The local bonding structure of titanium aluminum nitride (Ti1−xAlxN)(Ti1−xAlxN)textlessmath display=”inline” overflow=”scroll” altimg=”eq-00002.gif”textgreatertextlessmrowtextgreatertextlessmrowtextgreatertextlessmotextgreater(textless/motextgreatertextlessmrowtextgreatertextlessmsubtextgreatertextlessmrowtextgreatertextlessmtexttextgreaterTitextless/mtexttextgreatertextless/mrowtextgreatertextlessmrowtextgreatertextlessmntextgreater1textless/mntextgreatertextlessmotextgreater−textless/motextgreatertextlessmitextgreaterxtextless/mitextgreatertextless/mrowtextgreatertextless/msubtextgreatertextlessmsubtextgreatertextlessmrowtextgreatertextlessmtexttextgreaterAltextless/mtexttextgreatertextless/mrowtextgreatertextlessmitextgreaterxtextless/mitextgreatertextless/msubtextgreatertextlessmtexttextgreaterNtextless/mtexttextgreatertextless/mrowtextgreatertextlessmotextgreater)textless/motextgreatertextless/mrowtextgreatertextless/mrowtextgreatertextless/mathtextgreater films grown by dc magnetron cosputtering with different AlN molar fractions (x)(x)textlessmath display=”inline” overflow=”scroll” altimg=”eq-00003.gif”textgreatertextlessmrowtextgreatertextlessmrowtextgreatertextlessmotextgreater(textless/motextgreatertextlessmitextgreaterxtextless/mitextgreatertextlessmotextgreater)textless/motextgreatertextless/mrowtextgreatertextless/mrowtextgreatertextless/mathtextgreater has been studied by x-ray absorption near-edge structure (XANES) recorded in total electron yield mode. Grazing incidence x-ray diffraction (GIXRD) shows the formation of a ternary solid solution with cubic structure (c-Ti1−xAlxN)(c-Ti1−xAlxN)textlessmath display=”inline” overflow=”scroll” altimg=”eq-00004.gif”textgreatertextlessmrowtextgreatertextlessmrowtextgreatertextlessmotextgreater(textless/motextgreatertextlessmrowtextgreatertextlessmitextgreaterctextless/mitextgreatertextlessmsubtextgreatertextlessmrowtextgreatertextlessmtexttextgreater-Titextless/mtexttextgreatertextless/mrowtextgreatertextlessmrowtextgreatertextlessmntextgreater1textless/mntextgreatertextlessmotextgreater−textless/motextgreatertextlessmitextgreaterxtextless/mitextgreatertextless/mrowtextgreatertextless/msubtextgreatertextlessmsubtextgreatertextlessmrowtextgreatertextlessmtexttextgreaterAltextless/mtexttextgreatertextless/mrowtextgreatertextlessmitextgreaterxtextless/mitextgreatertextless/msubtextgreatertextlessmtexttextgreaterNtextless/mtexttextgreatertextless/mrowtextgreatertextlessmotextgreater)textless/motextgreatertextless/mrowtextgreatertextless/mrowtextgreatertextless/mathtextgreater that shrinks with the incorporation of Al and that, above a solubility limit of x∼0.7x∼0.7textlessmath display=”inline” overflow=”scroll” altimg=”eq-00005.gif”textgreatertextlessmrowtextgreatertextlessmitextgreaterxtextless/mitextgreatertextlessmotextgreater∼textless/motextgreatertextlessmntextgreater0.7textless/mntextgreatertextless/mrowtextgreatertextless/mathtextgreater, segregation of wwtextlessmath display=”inline” overflow=”scroll” altimg=”eq-00006.gif”textgreatertextlessmitextgreaterwtextless/mitextgreatertextless/mathtextgreater-AlN and c-Ti1−xAlxNc-Ti1−xAlxNtextlessmath display=”inline” overflow=”scroll” altimg=”eq-00007.gif”textgreatertextlessmrowtextgreatertextlessmitextgreaterctextless/mitextgreatertextlessmsubtextgreatertextlessmrowtextgreatertextlessmtexttextgreater-Titextless/mtexttextgreatertextless/mrowtextgreatertextlessmrowtextgreatertextlessmntextgreater1textless/mntextgreatertextlessmotextgreater−textless/motextgreatertextlessmitextgreaterxtextless/mitextgreatertextless/mrowtextgreatertextless/msubtextgreatertextlessmsubtextgreatertextlessmrowtextgreatertextlessmtexttextgreaterAltextless/mtexttextgreatertextless/mrowtextgreatertextlessmitextgreaterxtextless/mitextgreatertextless/msubtextgreatertextlessmtexttextgreaterNtextless/mtexttextgreatertextless/mrowtextgreatertextless/mathtextgreater phases occurs. The Al incorporation in the cubic structure and lattice shrinkage can also be observed using XANES spectral features. However, contrary to GIXRD, direct evidence of wwtextlessmath display=”inline” overflow=”scroll” altimg=”eq-00008.gif”textgreatertextlessmitextgreaterwtextless/mitextgreatertextless/mathtextgreater-AlN formation is not observed, suggesting a dominance and surface enrichment of cubic environments. For xtextgreater0.7xtextgreater0.7textlessmath display=”inline” overflow=”scroll” altimg=”eq-00009.gif”textgreatertextlessmrowtextgreatertextlessmitextgreaterxtextless/mitextgreatertextlessmotextgreater>textless/motextgreatertextlessmntextgreater0.7textless/mntextgreatertextless/mrowtextgreatertextless/mathtextgreater, XANES shows the formation of Ti–Al bonds, which could be related to the segregation of wwtextlessmath display=”inline” overflow=”scroll” altimg=”eq-00010.gif”textgreatertextlessmitextgreaterwtextless/mitextgreatertextless/mathtextgreater-AlN. This study shows the relevance of local-order information to assess the atomic structure of Ti1−xAlxNTi1−xAlxNtextlessmath display=”inline” overflow=”scroll” altimg=”eq-00011.gif”textgreatertextlessmrowtextgreatertextlessmsubtextgreatertextlessmrowtextgreatertextlessmtexttextgreaterTitextless/mtexttextgreatertextless/mrowtextgreatertextlessmrowtextgreatertextlessmntextgreater1textless/mntextgreatertextlessmotextgreater−textless/motextgreatertextlessmitextgreaterxtextless/mitextgreatertextless/mrowtextgreatertextless/msubtextgreatertextlessmsubtextgreatertextlessmrowtextgreatertextlessmtexttextgreaterAltextless/mtexttextgreatertextless/mrowtextgreatertextlessmitextgreaterxtextless/mitextgreatertextless/msubtextgreatertextlessmtexttextgreaterNtextless/mtexttextgreatertextless/mrowtextgreatertextless/mathtextgreater solutions.
Reference:
R. Gago, A. Redondo-Cubero, J. L. Endrino, I. Jiménez and N. Shevchenko, “Aluminum incorporation in Ti1−xAlxN films studied by x-ray absorption near-edge structure”, Journal of Applied Physics, vol. 105, no. 11, pp. 113521.
Bibtex Entry:
@article{gago_aluminum_2009,
title = {Aluminum incorporation in {Ti1}−{xAlxN} films studied by x-ray absorption near-edge structure},
volume = {105},
issn = {0021-8979},
url = {http://aip.scitation.org/doi/10.1063/1.3139296},
doi = {10.1063/1.3139296},
abstract = {The local bonding structure of titanium aluminum nitride (Ti1−xAlxN)(Ti1−xAlxN){textless}math display="inline" overflow="scroll" altimg="eq-00002.gif"{textgreater}{textless}mrow{textgreater}{textless}mrow{textgreater}{textless}mo{textgreater}({textless}/mo{textgreater}{textless}mrow{textgreater}{textless}msub{textgreater}{textless}mrow{textgreater}{textless}mtext{textgreater}Ti{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mrow{textgreater}{textless}mn{textgreater}1{textless}/mn{textgreater}{textless}mo{textgreater}−{textless}/mo{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}/mrow{textgreater}{textless}/msub{textgreater}{textless}msub{textgreater}{textless}mrow{textgreater}{textless}mtext{textgreater}Al{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}/msub{textgreater}{textless}mtext{textgreater}N{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mo{textgreater}){textless}/mo{textgreater}{textless}/mrow{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater} films grown by dc magnetron cosputtering with different AlN molar fractions (x)(x){textless}math display="inline" overflow="scroll" altimg="eq-00003.gif"{textgreater}{textless}mrow{textgreater}{textless}mrow{textgreater}{textless}mo{textgreater}({textless}/mo{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}mo{textgreater}){textless}/mo{textgreater}{textless}/mrow{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater} has been studied by x-ray absorption near-edge structure (XANES) recorded in total electron yield mode. Grazing incidence x-ray diffraction (GIXRD) shows the formation of a ternary solid solution with cubic structure (c-Ti1−xAlxN)(c-Ti1−xAlxN){textless}math display="inline" overflow="scroll" altimg="eq-00004.gif"{textgreater}{textless}mrow{textgreater}{textless}mrow{textgreater}{textless}mo{textgreater}({textless}/mo{textgreater}{textless}mrow{textgreater}{textless}mi{textgreater}c{textless}/mi{textgreater}{textless}msub{textgreater}{textless}mrow{textgreater}{textless}mtext{textgreater}-Ti{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mrow{textgreater}{textless}mn{textgreater}1{textless}/mn{textgreater}{textless}mo{textgreater}−{textless}/mo{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}/mrow{textgreater}{textless}/msub{textgreater}{textless}msub{textgreater}{textless}mrow{textgreater}{textless}mtext{textgreater}Al{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}/msub{textgreater}{textless}mtext{textgreater}N{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mo{textgreater}){textless}/mo{textgreater}{textless}/mrow{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater} that shrinks with the incorporation of Al and that, above a solubility limit of x∼0.7x∼0.7{textless}math display="inline" overflow="scroll" altimg="eq-00005.gif"{textgreater}{textless}mrow{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}mo{textgreater}∼{textless}/mo{textgreater}{textless}mn{textgreater}0.7{textless}/mn{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater}, segregation of ww{textless}math display="inline" overflow="scroll" altimg="eq-00006.gif"{textgreater}{textless}mi{textgreater}w{textless}/mi{textgreater}{textless}/math{textgreater}-AlN and c-Ti1−xAlxNc-Ti1−xAlxN{textless}math display="inline" overflow="scroll" altimg="eq-00007.gif"{textgreater}{textless}mrow{textgreater}{textless}mi{textgreater}c{textless}/mi{textgreater}{textless}msub{textgreater}{textless}mrow{textgreater}{textless}mtext{textgreater}-Ti{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mrow{textgreater}{textless}mn{textgreater}1{textless}/mn{textgreater}{textless}mo{textgreater}−{textless}/mo{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}/mrow{textgreater}{textless}/msub{textgreater}{textless}msub{textgreater}{textless}mrow{textgreater}{textless}mtext{textgreater}Al{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}/msub{textgreater}{textless}mtext{textgreater}N{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater} phases occurs. The Al incorporation in the cubic structure and lattice shrinkage can also be observed using XANES spectral features. However, contrary to GIXRD, direct evidence of ww{textless}math display="inline" overflow="scroll" altimg="eq-00008.gif"{textgreater}{textless}mi{textgreater}w{textless}/mi{textgreater}{textless}/math{textgreater}-AlN formation is not observed, suggesting a dominance and surface enrichment of cubic environments. For x{textgreater}0.7x{textgreater}0.7{textless}math display="inline" overflow="scroll" altimg="eq-00009.gif"{textgreater}{textless}mrow{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}mo{textgreater}>{textless}/mo{textgreater}{textless}mn{textgreater}0.7{textless}/mn{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater}, XANES shows the formation of Ti–Al bonds, which could be related to the segregation of ww{textless}math display="inline" overflow="scroll" altimg="eq-00010.gif"{textgreater}{textless}mi{textgreater}w{textless}/mi{textgreater}{textless}/math{textgreater}-AlN. This study shows the relevance of local-order information to assess the atomic structure of Ti1−xAlxNTi1−xAlxN{textless}math display="inline" overflow="scroll" altimg="eq-00011.gif"{textgreater}{textless}mrow{textgreater}{textless}msub{textgreater}{textless}mrow{textgreater}{textless}mtext{textgreater}Ti{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mrow{textgreater}{textless}mn{textgreater}1{textless}/mn{textgreater}{textless}mo{textgreater}−{textless}/mo{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}/mrow{textgreater}{textless}/msub{textgreater}{textless}msub{textgreater}{textless}mrow{textgreater}{textless}mtext{textgreater}Al{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mi{textgreater}x{textless}/mi{textgreater}{textless}/msub{textgreater}{textless}mtext{textgreater}N{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater} solutions.},
number = {11},
urldate = {2017-10-06},
journal = {Journal of Applied Physics},
author = {Gago, R. and Redondo-Cubero, A. and Endrino, J. L. and Jiménez, I. and Shevchenko, N.},
month = jun,
year = {2009},
pages = {113521},
file = {Full Text PDF:E:\cmam_papers\files\977\Gago et al. - 2009 - Aluminum incorporation in Ti1−xAlxN films studied .pdf:application/pdf;Full Text PDF:E:\Usuarios\Administrator\Zotero\storage\ZA5N4MGW\Gago et al. - 2009 - Aluminum incorporation in Ti1−xAlxN films studied .pdf:application/pdf;Snapshot:E:\cmam_papers\files\980\1.html:text/html;Snapshot:E:\Usuarios\Administrator\Zotero\storage\PRZKKD6V\1.html:text/html},
}