SiC, Al2O3 and Si HEMT Structures Characterization and Processing Impact on AlGaN Surface

Jan 20, 2025

by González-Posada F.
Reference:
González-Posada F., “SiC, Al2O3 and Si HEMT Structures Characterization and Processing Impact on AlGaN Surface”, Seminars at CMAM, Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid.
Bibtex Entry:
@misc{f_gonzalez-posada_sic_2006,
	address = {Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid},
	type = {Seminars at {CMAM}},
	title = {{SiC}, {Al2O3} and {Si} {HEMT} {Structures} {Characterization} and {Processing} {Impact} on {AlGaN} {Surface}},
	author = {F., González-Posada},
	month = may,
	year = {2006},
}