Towards nanometric resolution in multilayer depth profiling: RBS, SIMS, XPS and GDOES comparative study

Apr 1, 2022

Reference:

, “Towards nanometric resolution in multilayer depth profiling: RBS, SIMS, XPS and GDOES comparative study”, Oviedo, Spain, 2009.

Bibtex Entry:

@misc{escobar_galindo_r_towards_2009,
	address = {Oviedo, Spain},
	type = {Invited contributions},
	title = {Towards nanometric resolution in multilayer depth profiling: {RBS}, {SIMS}, {XPS} and {GDOES} comparative study},
	author = {{Escobar Galindo, R.}},
	year = {2009},
}