by J. G. Buijnsters, R. Gago, I. Jiménez, M. Camero, F. Agulló-Rueda and C. Gómez-Aleixandre
Abstract:
In this study, we have employed infrared (IR) absorption spectroscopy, visible Raman spectroscopy, and x-ray absorption near edge structure (XANES) to quantify the hydrogen (H) content in hydrogenated amorphous carbon (aatextlessmath display=”inline” overflow=”scroll” altimg=”eq-00001.gif”textgreatertextlessmitextgreateratextless/mitextgreatertextless/mathtextgreater-C:H) films. aatextlessmath display=”inline” overflow=”scroll” altimg=”eq-00002.gif”textgreatertextlessmitextgreateratextless/mitextgreatertextless/mathtextgreater-C:H films with a hydrogen content varying from 29 to 47 at. %47 at. %textlessmath display=”inline” overflow=”scroll” altimg=”eq-00003.gif”textgreatertextlessmrowtextgreatertextlessmntextgreater47textless/mntextgreatertextlessmtexttextgreater textless/mtexttextgreatertextlessmtexttextgreaterattextless/mtexttextgreatertextlessmtexttextgreater.textless/mtexttextgreatertextlessmtexttextgreater textless/mtexttextgreatertextlessmitextgreater%textless/mitextgreatertextless/mrowtextgreatertextless/mathtextgreater have been synthesized by electron cyclotron resonance chemical vapor deposition at low substrate temperatures (textless120 °C)(textless120 °C)textlessmath display=”inline” overflow=”scroll” altimg=”eq-00004.gif”textgreatertextlessmrowtextgreatertextlessmrowtextgreatertextlessmotextgreater(textless/motextgreatertextlessmrowtextgreatertextlessmotextgreater<textless/motextgreatertextlessmntextgreater120textless/mntextgreatertextlessmtexttextgreater textless/mtexttextgreatertextlessmotextgreater°textless/motextgreatertextlessmtexttextgreaterCtextless/mtexttextgreatertextless/mrowtextgreatertextlessmotextgreater)textless/motextgreatertextless/mrowtextgreatertextless/mrowtextgreatertextless/mathtextgreater applying a wide range of bias voltage, VbVbtextlessmath display=”inline” overflow=”scroll” altimg=”eq-00005.gif”textgreatertextlessmrowtextgreatertextlessmsubtextgreatertextlessmitextgreaterVtextless/mitextgreatertextlessmitextgreaterbtextless/mitextgreatertextless/msubtextgreatertextless/mrowtextgreatertextless/mathtextgreater, (−300 VtextlessVbtextless+100 V)(−300 VtextlessVbtextless+100 V)textlessmath display=”inline” overflow=”scroll” altimg=”eq-00006.gif”textgreatertextlessmrowtextgreatertextlessmrowtextgreatertextlessmotextgreater(textless/motextgreatertextlessmrowtextgreatertextlessmotextgreater−textless/motextgreatertextlessmntextgreater300textless/mntextgreatertextlessmtexttextgreater textless/mtexttextgreatertextlessmtexttextgreaterVtextless/mtexttextgreatertextlessmotextgreater<textless/motextgreatertextlessmsubtextgreatertextlessmitextgreaterVtextless/mitextgreatertextlessmitextgreaterbtextless/mitextgreatertextless/msubtextgreatertextlessmotextgreater<textless/motextgreatertextlessmotextgreater+textless/motextgreatertextlessmntextgreater100textless/mntextgreatertextlessmtexttextgreater textless/mtexttextgreatertextlessmtexttextgreaterVtextless/mtexttextgreatertextless/mrowtextgreatertextlessmotextgreater)textless/motextgreatertextless/mrowtextgreatertextless/mrowtextgreatertextless/mathtextgreater. With the application of high negative VbVbtextlessmath display=”inline” overflow=”scroll” altimg=”eq-00007.gif”textgreatertextlessmrowtextgreatertextlessmsubtextgreatertextlessmitextgreaterVtextless/mitextgreatertextlessmitextgreaterbtextless/mitextgreatertextless/msubtextgreatertextless/mrowtextgreatertextless/mathtextgreater, the aatextlessmath display=”inline” overflow=”scroll” altimg=”eq-00008.gif”textgreatertextlessmitextgreateratextless/mitextgreatertextless/mathtextgreater-C:H films undergo a dehydrogenation process accompanied by a sharp structural modification from polymer- to fullerenelike films. The trend in the H content derived from elastic recoil detection analysis (ERDA) is quantitatively reproduced from the intensity of the C–H bands and states in the IR and XANES spectra, respectively, as well as from the photoluminescence (PL) background drop in the Raman spectra. Using the H contents obtained by ERDA as reference data, semiquantitative expressions are inferred for the amount of bonded hydrogen as a function of the experimental spectroscopic parameters, i.e., the integrated area of the IR C–H stretching band at about 2900 cm−12900 cm−1textlessmath display=”inline” overflow=”scroll” altimg=”eq-00009.gif”textgreatertextlessmrowtextgreatertextlessmntextgreater2900textless/mntextgreatertextlessmtexttextgreater textless/mtexttextgreatertextlessmsuptextgreatertextlessmrowtextgreatertextlessmtexttextgreatercmtextless/mtexttextgreatertextless/mrowtextgreatertextlessmrowtextgreatertextlessmotextgreater−textless/motextgreatertextlessmntextgreater1textless/mntextgreatertextless/mrowtextgreatertextless/msuptextgreatertextless/mrowtextgreatertextless/mathtextgreater, the PL background in visible Raman spectra, and the XANES intensity of the σ∗-CHσ∗-CHtextlessmath display=”inline” overflow=”scroll” altimg=”eq-00010.gif”textgreatertextlessmrowtextgreatertextlessmsuptextgreatertextlessmitextgreaterσtextless/mitextgreatertextlessmotextgreater∗textless/motextgreatertextless/msuptextgreatertextlessmtexttextgreater-CHtextless/mtexttextgreatertextless/mrowtextgreatertextless/mathtextgreater peak.
Reference:
J. G. Buijnsters, R. Gago, I. Jiménez, M. Camero, F. Agulló-Rueda and C. Gómez-Aleixandre, “Hydrogen quantification in hydrogenated amorphous carbon films by infrared, Raman, and x-ray absorption near edge spectroscopies”, Journal of Applied Physics, vol. 105, no. 9, pp. 093510.
Bibtex Entry:
@article{buijnsters_hydrogen_2009,
title = {Hydrogen quantification in hydrogenated amorphous carbon films by infrared, {Raman}, and x-ray absorption near edge spectroscopies},
volume = {105},
issn = {0021-8979},
url = {http://aip.scitation.org/doi/10.1063/1.3103326},
doi = {10.1063/1.3103326},
abstract = {In this study, we have employed infrared (IR) absorption spectroscopy, visible Raman spectroscopy, and x-ray absorption near edge structure (XANES) to quantify the hydrogen (H) content in hydrogenated amorphous carbon (aa{textless}math display="inline" overflow="scroll" altimg="eq-00001.gif"{textgreater}{textless}mi{textgreater}a{textless}/mi{textgreater}{textless}/math{textgreater}-C:H) films. aa{textless}math display="inline" overflow="scroll" altimg="eq-00002.gif"{textgreater}{textless}mi{textgreater}a{textless}/mi{textgreater}{textless}/math{textgreater}-C:H films with a hydrogen content varying from 29 to 47 at. %47 at. %{textless}math display="inline" overflow="scroll" altimg="eq-00003.gif"{textgreater}{textless}mrow{textgreater}{textless}mn{textgreater}47{textless}/mn{textgreater}{textless}mtext{textgreater} {textless}/mtext{textgreater}{textless}mtext{textgreater}at{textless}/mtext{textgreater}{textless}mtext{textgreater}.{textless}/mtext{textgreater}{textless}mtext{textgreater} {textless}/mtext{textgreater}{textless}mi{textgreater}%{textless}/mi{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater} have been synthesized by electron cyclotron resonance chemical vapor deposition at low substrate temperatures ({textless}120 °C)({textless}120 °C){textless}math display="inline" overflow="scroll" altimg="eq-00004.gif"{textgreater}{textless}mrow{textgreater}{textless}mrow{textgreater}{textless}mo{textgreater}({textless}/mo{textgreater}{textless}mrow{textgreater}{textless}mo{textgreater}<{textless}/mo{textgreater}{textless}mn{textgreater}120{textless}/mn{textgreater}{textless}mtext{textgreater} {textless}/mtext{textgreater}{textless}mo{textgreater}°{textless}/mo{textgreater}{textless}mtext{textgreater}C{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mo{textgreater}){textless}/mo{textgreater}{textless}/mrow{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater} applying a wide range of bias voltage, VbVb{textless}math display="inline" overflow="scroll" altimg="eq-00005.gif"{textgreater}{textless}mrow{textgreater}{textless}msub{textgreater}{textless}mi{textgreater}V{textless}/mi{textgreater}{textless}mi{textgreater}b{textless}/mi{textgreater}{textless}/msub{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater}, (−300 V{textless}Vb{textless}+100 V)(−300 V{textless}Vb{textless}+100 V){textless}math display="inline" overflow="scroll" altimg="eq-00006.gif"{textgreater}{textless}mrow{textgreater}{textless}mrow{textgreater}{textless}mo{textgreater}({textless}/mo{textgreater}{textless}mrow{textgreater}{textless}mo{textgreater}−{textless}/mo{textgreater}{textless}mn{textgreater}300{textless}/mn{textgreater}{textless}mtext{textgreater} {textless}/mtext{textgreater}{textless}mtext{textgreater}V{textless}/mtext{textgreater}{textless}mo{textgreater}<{textless}/mo{textgreater}{textless}msub{textgreater}{textless}mi{textgreater}V{textless}/mi{textgreater}{textless}mi{textgreater}b{textless}/mi{textgreater}{textless}/msub{textgreater}{textless}mo{textgreater}<{textless}/mo{textgreater}{textless}mo{textgreater}+{textless}/mo{textgreater}{textless}mn{textgreater}100{textless}/mn{textgreater}{textless}mtext{textgreater} {textless}/mtext{textgreater}{textless}mtext{textgreater}V{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mo{textgreater}){textless}/mo{textgreater}{textless}/mrow{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater}. With the application of high negative VbVb{textless}math display="inline" overflow="scroll" altimg="eq-00007.gif"{textgreater}{textless}mrow{textgreater}{textless}msub{textgreater}{textless}mi{textgreater}V{textless}/mi{textgreater}{textless}mi{textgreater}b{textless}/mi{textgreater}{textless}/msub{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater}, the aa{textless}math display="inline" overflow="scroll" altimg="eq-00008.gif"{textgreater}{textless}mi{textgreater}a{textless}/mi{textgreater}{textless}/math{textgreater}-C:H films undergo a dehydrogenation process accompanied by a sharp structural modification from polymer- to fullerenelike films. The trend in the H content derived from elastic recoil detection analysis (ERDA) is quantitatively reproduced from the intensity of the C–H bands and states in the IR and XANES spectra, respectively, as well as from the photoluminescence (PL) background drop in the Raman spectra. Using the H contents obtained by ERDA as reference data, semiquantitative expressions are inferred for the amount of bonded hydrogen as a function of the experimental spectroscopic parameters, i.e., the integrated area of the IR C–H stretching band at about 2900 cm−12900 cm−1{textless}math display="inline" overflow="scroll" altimg="eq-00009.gif"{textgreater}{textless}mrow{textgreater}{textless}mn{textgreater}2900{textless}/mn{textgreater}{textless}mtext{textgreater} {textless}/mtext{textgreater}{textless}msup{textgreater}{textless}mrow{textgreater}{textless}mtext{textgreater}cm{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}mrow{textgreater}{textless}mo{textgreater}−{textless}/mo{textgreater}{textless}mn{textgreater}1{textless}/mn{textgreater}{textless}/mrow{textgreater}{textless}/msup{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater}, the PL background in visible Raman spectra, and the XANES intensity of the σ∗-CHσ∗-CH{textless}math display="inline" overflow="scroll" altimg="eq-00010.gif"{textgreater}{textless}mrow{textgreater}{textless}msup{textgreater}{textless}mi{textgreater}σ{textless}/mi{textgreater}{textless}mo{textgreater}∗{textless}/mo{textgreater}{textless}/msup{textgreater}{textless}mtext{textgreater}-CH{textless}/mtext{textgreater}{textless}/mrow{textgreater}{textless}/math{textgreater} peak.},
number = {9},
urldate = {2017-10-06},
journal = {Journal of Applied Physics},
author = {Buijnsters, J. G. and Gago, R. and Jiménez, I. and Camero, M. and Agulló-Rueda, F. and Gómez-Aleixandre, C.},
month = may,
year = {2009},
pages = {093510},
file = {Full Text PDF:E:\cmam_papers\files\962\Buijnsters et al. - 2009 - Hydrogen quantification in hydrogenated amorphous .pdf:application/pdf;Full Text PDF:E:\Usuarios\Administrator\Zotero\storage\2NEN73DV\Buijnsters et al. - 2009 - Hydrogen quantification in hydrogenated amorphous .pdf:application/pdf;Snapshot:E:\cmam_papers\files\966\1.html:text/html;Snapshot:E:\Usuarios\Administrator\Zotero\storage\XT2QQK6M\1.html:text/html},
}