by R. W. Smith, J. Plaza, D. Ghita, M. Sánchez, B. J. García, A. Muñoz-Martín and A. Climent-Font
Abstract:
N profiles of several GaAs1−xNx epitaxial layers with different N mole fractions in the range 0textlessxtextless0.14 were obtained by using (1) heavy-ion elastic recoil detection analysis (HI-ERDA) along with Rutherford backscattering spectrometry (RBS) using a 35MeV Si6+ beam, and (2) nuclear reaction analysis (NRA) with the 14N(α,p)17O reaction, also with RBS, using a 3.7MeV 4He+ beam. The results from the two techniques are compared and the advantages, disadvantages and capabilities are discussed.
Reference:
R. W. Smith, J. Plaza, D. Ghita, M. Sánchez, B. J. García, A. Muñoz-Martín and A. Climent-Font, “The use of HI-ERDA/RBS and NRA/RBS to depth profile N in GaAs1−xNx thin films”, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 266, no. 8, pp. 1450–1454.
Bibtex Entry:
@article{smith_use_2008,
series = {Ion {Beam} {Analysis}},
title = {The use of {HI}-{ERDA}/{RBS} and {NRA}/{RBS} to depth profile {N} in {GaAs1}−{xNx} thin films},
volume = {266},
issn = {0168-583X},
url = {http://www.sciencedirect.com/science/article/pii/S0168583X08000815},
doi = {10.1016/j.nimb.2008.01.024},
abstract = {N profiles of several GaAs1−xNx epitaxial layers with different N mole fractions in the range 0{textless}x{textless}0.14 were obtained by using (1) heavy-ion elastic recoil detection analysis (HI-ERDA) along with Rutherford backscattering spectrometry (RBS) using a 35MeV Si6+ beam, and (2) nuclear reaction analysis (NRA) with the 14N(α,p)17O reaction, also with RBS, using a 3.7MeV 4He+ beam. The results from the two techniques are compared and the advantages, disadvantages and capabilities are discussed.},
number = {8},
urldate = {2017-10-06},
journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms},
author = {Smith, R. W. and Plaza, J. and Ghita, D. and Sánchez, M. and García, B. J. and Muñoz-Martín, A. and Climent-Font, A.},
month = apr,
year = {2008},
keywords = {RBS, NRA, GaAsN, HI-ERDA, N(α,p)O},
pages = {1450--1454},
file = {ScienceDirect Full Text PDF:E:\cmam_papers\files\953\Smith et al. - 2008 - The use of HI-ERDARBS and NRARBS to depth profil.pdf:application/pdf;ScienceDirect Full Text PDF:E:\Usuarios\Administrator\Zotero\storage\3ZLE2IAT\Smith et al. - 2008 - The use of HI-ERDARBS and NRARBS to depth profil.pdf:application/pdf;ScienceDirect Snapshot:E:\cmam_papers\files\949\S0168583X08000815.html:text/html;ScienceDirect Snapshot:E:\Usuarios\Administrator\Zotero\storage\S2P6XTYD\S0168583X08000815.html:text/html},
}