by P. Prieto, C. Morant, A. Climent-Font, A. Muñoz, E. Elizalde and J. M. Sanz
Reference:
P. Prieto, C. Morant, A. Climent-Font, A. Muñoz, E. Elizalde and J. M. Sanz, “Quantitative analysis of CN∕TiCN∕TiN multilayers and their thermal stability by Auger electron spectroscopy and Rutherford backscattering spectrometry depth profiles”, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 24, no. 2, pp. 250–260.
Bibtex Entry:
@article{prieto_quantitative_2006,
title = {Quantitative analysis of {CN}∕{TiCN}∕{TiN} multilayers and their thermal stability by {Auger} electron spectroscopy and {Rutherford} backscattering spectrometry depth profiles},
volume = {24},
issn = {0734-2101},
url = {http://avs.scitation.org/doi/10.1116/1.2165664},
doi = {10.1116/1.2165664},
number = {2},
urldate = {2017-07-21},
journal = {Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films},
author = {Prieto, P. and Morant, C. and Climent-Font, A. and Muñoz, A. and Elizalde, E. and Sanz, J. M.},
month = feb,
year = {2006},
pages = {250--260},
file = {Snapshot:E:\cmam_papers\files\568\1.html:text/html;Snapshot:E:\Usuarios\Administrator\Zotero\storage\IUBTIY3D\1.html:text/html},
}