by M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez and J. B. Ramiro
Abstract:
The propagation losses (PL) of lithium niobate optical planar waveguides fabricated by swift heavy-ion irradiation (SHI), an alternative to conventional ion implantation, have been investigated and optimized. For waveguide fabrication, congruently melting LiNbO3 substrates were irradiated with F ions at 20 MeV or 30 MeV and fluences in the range 1013–1014 cm−2. The influence of the temperature and time of post-irradiation annealing treatments has been systematically studied. Optimum propagation losses lower than 0.5 dB/cm have been obtained for both TE and TM modes, after a two-stage annealing treatment at 350 and 375∘C. Possible loss mechanisms are discussed.
Reference:
M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation”, Applied Physics B, vol. 107, no. 1, pp. 157–162.
Bibtex Entry:
@article{jubera_analysis_2012,
	title = {Analysis and optimization of propagation losses in {LiNbO3} optical waveguides produced by swift heavy-ion irradiation},
	volume = {107},
	issn = {0946-2171, 1432-0649},
	url = {https://link.springer.com/article/10.1007/s00340-012-4897-9},
	doi = {10.1007/s00340-012-4897-9},
	abstract = {The propagation losses (PL) of lithium niobate optical planar waveguides fabricated by swift heavy-ion irradiation (SHI), an alternative to conventional ion implantation, have been investigated and optimized. For waveguide fabrication, congruently melting LiNbO3 substrates were irradiated with F ions at 20 MeV or 30 MeV and fluences in the range 1013–1014 cm−2. The influence of the temperature and time of post-irradiation annealing treatments has been systematically studied. Optimum propagation losses lower than 0.5 dB/cm have been obtained for both TE and TM modes, after a two-stage annealing treatment at 350 and 375∘C. Possible loss mechanisms are discussed.},
	language = {en},
	number = {1},
	urldate = {2017-10-10},
	journal = {Applied Physics B},
	author = {Jubera, M. and Villarroel, J. and García-Cabañes, A. and Carrascosa, M. and Olivares, J. and Agullo-López, F. and Méndez, A. and Ramiro, J. B.},
	month = apr,
	year = {2012},
	pages = {157--162},
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}