Study of oxidized iron thin films by non-Rutherford elastic scattering

@article{jimenez-villacorta_study_2006,
	series = {Ion {Beam} {Analysis}},
	title = {Study of oxidized iron thin films by non-{Rutherford} elastic scattering},
	volume = {249},
	issn = {0168-583X},
	url = {http://www.sciencedirect.com/science/article/pii/S0168583X06002746},
	doi = {10.1016/j.nimb.2006.03.036},
	abstract = {Rutherford and non-Rutherford elastic scattering analyses have been performed to characterize oxidized iron thin films grown by sputtering. The oxygen depth profiles along the thickness of all the samples have been studied in order to unravel the oxidation process of these samples. The oxygen concentration along the film was related to the sample preparation parameters, resulting in a strong dependence of oxygen depth profile on the substrate temperature during deposition.},
	number = {1},
	urldate = {2017-07-21},
	journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms},
	author = {Jiménez-Villacorta, F. and Muñoz-Martín, A. and Prieto, C.},
	month = aug,
	year = {2006},
	keywords = {RBS, Low temperature sputtering deposition, Nanocrystalline iron thin films, Resonant scattering},
	pages = {486--489},
	file = {ScienceDirect Snapshot:E:\cmam_papers\files\537\S0168583X06002746.html:text/html;ScienceDirect Snapshot:E:\Usuarios\Administrator\Zotero\storage\R54F5RJP\S0168583X06002746.html:text/html},
}