by M. L. Crespillo, M. Otto, A. Munoz-Martin, J. Olivares, F. Agulló-López, M. Seibt, M. Toulemonde and C. Trautmann
Abstract:
The morphology of the nanopores obtained by chemical etching on ion-beam irradiated LiNbO3 has been investigated for a variety of ions (F, Br, Kr, Cu, Pb), energies (up to 2300MeV), and stopping powers (up to 35keV/nm) in the electronic energy loss regime. The role of etching time and etching agent on the pore morphology, diameter, depth, and shape has also been studied. The transversal and depth profiles of the pore have been found to be quite sensitive to both irradiation and etching parameters. Moreover, two etching regimes with different morphologies and etching rates have been identified.
Reference:
M. L. Crespillo, M. Otto, A. Munoz-Martin, J. Olivares, F. Agulló-López, M. Seibt, M. Toulemonde and C. Trautmann, “Optimization of nanopores obtained by chemical etching on swift-ion irradiated lithium niobate”, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 267, no. 6, pp. 1035–1038.
Bibtex Entry:
@article{crespillo_optimization_2009,
series = {Proceedings of the {Seventh} {International} {Symposium} on {Swift} {Heavy} {Ions} in {Matter}},
title = {Optimization of nanopores obtained by chemical etching on swift-ion irradiated lithium niobate},
volume = {267},
issn = {0168-583X},
url = {http://www.sciencedirect.com/science/article/pii/S0168583X09002560},
doi = {10.1016/j.nimb.2009.02.028},
abstract = {The morphology of the nanopores obtained by chemical etching on ion-beam irradiated LiNbO3 has been investigated for a variety of ions (F, Br, Kr, Cu, Pb), energies (up to 2300MeV), and stopping powers (up to 35keV/nm) in the electronic energy loss regime. The role of etching time and etching agent on the pore morphology, diameter, depth, and shape has also been studied. The transversal and depth profiles of the pore have been found to be quite sensitive to both irradiation and etching parameters. Moreover, two etching regimes with different morphologies and etching rates have been identified.},
number = {6},
urldate = {2017-10-06},
journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms},
author = {Crespillo, M. L. and Otto, M. and Munoz-Martin, A. and Olivares, J. and Agulló-López, F. and Seibt, M. and Toulemonde, M. and Trautmann, C.},
month = mar,
year = {2009},
keywords = {Ion tracks, Lithium niobate, Nanopores, AFM, Swift-ion irradiation, 61.80.Jh, 42.70.Mp, 81.07.−b},
pages = {1035--1038},
file = {ScienceDirect Full Text PDF:E:\cmam_papers\files\979\Crespillo et al. - 2009 - Optimization of nanopores obtained by chemical etc.pdf:application/pdf;ScienceDirect Full Text PDF:E:\Usuarios\Administrator\Zotero\storage\QEUG6C3B\Crespillo et al. - 2009 - Optimization of nanopores obtained by chemical etc.pdf:application/pdf;ScienceDirect Snapshot:E:\cmam_papers\files\972\S0168583X09002560.html:text/html;ScienceDirect Snapshot:E:\Usuarios\Administrator\Zotero\storage\SE94TJY3\S0168583X09002560.html:text/html},
}