Crystallographic structure and surface composition of NbNx thin films grown by RF magnetron sputtering

by J. E. Alfonso, J. Buitrago, J. Torres, B. Santos and J. F. Marco

Abstract:

In this work we report on the results obtained on NbNx thin films grown on both common glass and silicon wafer substrates by RF magnetron sputtering at different substrate temperatures and different target power supplies. The crystalinity, morphology and surface composition of the deposited films have been characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively.

View PDF

Reference:

J. E. Alfonso, J. Buitrago, J. Torres, B. Santos and J. F. Marco, “Crystallographic structure and surface composition of NbNx thin films grown by RF magnetron sputtering”, Microelectronics Journal, vol. 39, no. 11, pp. 1327–1328.

Bibtex Entry:

@article{alfonso_crystallographic_2008,
	title = {Crystallographic structure and surface composition of {NbNx} thin films grown by {RF} magnetron sputtering},
	volume = {39},
	issn = {0026-2692},
	url = {http://www.sciencedirect.com/science/article/pii/S0026269208000736},
	doi = {10.1016/j.mejo.2008.01.027},
	abstract = {In this work we report on the results obtained on NbNx thin films grown on both common glass and silicon wafer substrates by RF magnetron sputtering at different substrate temperatures and different target power supplies. The crystalinity, morphology and surface composition of the deposited films have been characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively.},
	number = {11},
	urldate = {2017-09-18},
	journal = {Microelectronics Journal},
	author = {Alfonso, J. E. and Buitrago, J. and Torres, J. and Santos, B. and Marco, J. F.},
	month = nov,
	year = {2008},
	keywords = {Thin films, Sputtering, XPS},
	pages = {1327--1328},
	file = {ScienceDirect Full Text PDF:E:\cmam_papers\files\841\Alfonso et al. - 2008 - Crystallographic structure and surface composition.pdf:application/pdf;ScienceDirect Full Text PDF:E:\Usuarios\Administrator\Zotero\storage\I65Y4Y7P\Alfonso et al. - 2008 - Crystallographic structure and surface composition.pdf:application/pdf;ScienceDirect Snapshot:E:\cmam_papers\files\840\S0026269208000736.html:text/html;ScienceDirect Snapshot:E:\Usuarios\Administrator\Zotero\storage\7868H6V6\S0026269208000736.html:text/html},
}