Event 

Title:
Seminarios en el Acelerador - Micro y nano mecanizado tridimensional de Silicio
When:
08.03.2013 - 08.03.2013
Where:
CMAM - Madrid
Categoría:
Seminarios informales en el Acelerador

Description

Ponente: Sara Azimi, National University of Singapore

Titulo: Micro y nano mecanizado tridimensional de Silicio

Abstract: A novel process for fabricating true, three-dimensional (3D) silicon and porous silicon components at micro- and nano-scale dimensions is developed. Using this process, structures which can be two- and three-dimensional, free-standing, arbitrary-shaped, or curved, and with features at multiple heights, and combined at micro- and nano-scale dimensions are fabricated in a single etch step. This process is based on high-energy ion irradiation, such as 100 keV to 2 MeV protons and helium ions, of p-type silicon wafers. Ion irradiation alters the hole current flow during subsequent electrochemical anodization, allowing the anodization rate to be slowed/stopped for low/high fluences. For moderate fluences the anodization rate is selectively stopped only at depths corresponding to the high defect density at the end of ion range, giving a promising machining technique for true 3D silicon micro/nano-fabrication. This project aims to further develop and study this machining technique and attempt to fabricate different machined structures for various applications. Applications of this two- and three-dimensional machining process in different fields such as microfluidics, micro-electromechanical systems (MEMS), photonics, nano-scale depth machining and nanostencil mask fabrication will be presented. Further development of this machining technique may lead to fabrication of highly compact custom-shaped 3D systems-on-a-chip to develop future micro- and nano-technologies.

Venue

CMAM
Venue:
CMAM   -   Website
Street:
Faraday 3, Campus de Cantoblanco
ZIP:
28049
City:
Madrid
Country:
Country: es

Description

El seminario tendrá lugar en la sala de reuniones del CMAM